KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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Date | 2021/11/15 |
Presentation Theme | Film properties of silicon nitride thin films embedded with nanocrystalline Si |
Conference | TACT2021 International Thin Films Conference (A-P-166) |
Promoters | Taiwan Association for Coating and Thin Film Technology |
Conference Type | International |
Presentation Type | Poster |
Contribution Type | Collaborative |
Venue | National Taipei University of Technology (Virtual conference) |
Holding period | 2021/11/15~2021/11/18 |
Publisher and common publisher | Tomohiro Matsuda , Takumi Kidokoro, Hiroshi Katsumata |