KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Date 2021/11/15
Presentation Theme Deposition of Mg2Si1-xSnx films by co-sputtering using two different targets and a comparison of the effect of subsequent thermal annealing process on film properties
Conference TACT2021 International Thin Films Conference (C-P-146)
Promoters Taiwan Association for Coating and Thin Film Technology
Conference Type International
Presentation Type Poster
Contribution Type Collaborative
Venue National Taipei University of Technology (Virtual conference)
Holding period 2021/11/15~2021/11/18
Publisher and common publisher Kenta Uefuji, Hiroshi Katsumata