KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Date 2022/07/31
Presentation Theme Correlation between Plasma Color and Properties of Mg2Si Thin Films formed by RF Magnetron Sputtering
Conference 6th Asia-Pacific Conference on Semiconducting Silicides (APAC SILICIDE 2022) (P-II-12, pp.151-15)
Conference Type International
Presentation Type Poster
Contribution Type Collaborative
Venue On-line
Holding period 2022/07/30~2022/08/01
Publisher and common publisher Yuto Hida, Syunta Owari, Kenta Uefuji and Hiroshi Katsumata