KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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Date | 2022/07/31 |
Presentation Theme | Correlation between Plasma Color and Properties of Mg2Si Thin Films formed by RF Magnetron Sputtering |
Conference | 6th Asia-Pacific Conference on Semiconducting Silicides (APAC SILICIDE 2022) (P-II-12, pp.151-15) |
Conference Type | International |
Presentation Type | Poster |
Contribution Type | Collaborative |
Venue | On-line |
Holding period | 2022/07/30~2022/08/01 |
Publisher and common publisher | Yuto Hida, Syunta Owari, Kenta Uefuji and Hiroshi Katsumata |