KATSUMATA Hiroshi    Department   Undergraduate School  , School of Science and Technology    Position   Associate Professor
Date	2011/12/12
Presentation Theme	Deposition of TaN Films by RF sputtering and their barrier properties in Cu/TaN/Dielectrics/Si MIS structures
Conference	6th International Symposium on Surface Science (ISSS-6)
Promoters	The Surface Science Society of Japan
Presentation Type	Poster
Contribution Type	Collaborative
Publisher and common publisher	Hiroaki Tajima, Hiroshi Katsumata, Shin-ichiro Uekusa