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KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
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| Date | 1998/06/22 |
| Presentation Theme | Formation of oxide thin films by O2-cluster ion beam assisted deposition |
| Conference | 12th International Conference on Ion Implantation Technology, Kyoto, Japan |
| Presentation Type | Speech (General) |
| Contribution Type | Collaborative |
| Publisher and common publisher | H. Katsumata, J. Matsuo, T. Nishihara, T. Tachibana, K. Yamada, M. Adachi, E. Minami and I. Yamada |