KATSUMATA Hiroshi    Department   Undergraduate School  , School of Science and Technology    Position   Associate Professor
Date	1995/04
Presentation Theme	Fabrication of epitaxial silicides thin films by combining low-energy ion beam deposition and silicon molecular beam epitaxy
Conference	Mater. Res. Soc. Symp.
Presentation Type	Speech (General)
Contribution Type	Collaborative
Publisher and common publisher	"H. Shibata, Y. Makita, H. Katsumata, 他8名"