KATSUMATA Hiroshi
Department Undergraduate School , School of Science and Technology Position Associate Professor |
|
Date | 1995/02/05 |
Presentation Theme | Optical and structural properties of β-FeSi2 layers on Si fabricated by triple 56Fe ion implantations |
Conference | 9th International Conference on Ion Beam Modification of Materials,Canberra, Australia |
Conference Type | International |
Presentation Type | Speech (General) |
Contribution Type | Collaborative |
Publisher and common publisher | H. Katsumata, H. Shen, N. Kobayashi, Y. Makita, M. Hasegawa, H. Shibata, S. Kimura, A. Obara, and S. Uekusa |