KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Date 1995/02/05
Presentation Theme Optical and structural properties of β-FeSi2 layers on Si fabricated by triple 56Fe ion implantations
Conference 9th International Conference on Ion Beam Modification of Materials,Canberra, Australia
Conference Type International
Presentation Type Speech (General)
Contribution Type Collaborative
Publisher and common publisher H. Katsumata, H. Shen, N. Kobayashi, Y. Makita, M. Hasegawa, H. Shibata, S. Kimura, A. Obara, and S. Uekusa