KATSUMATA Hiroshi
   Department   Undergraduate School  , School of Science and Technology
   Position   Associate Professor
Date 2014/11/13
Presentation Theme Formation of ZnGaON Films Prepared by Two Types of co-Sputtering using ZnO or Zn Target and their Optical Properties
Conference AVS (American Vacuum Society) 61st International Symposium and Exhibition (AVS-61), Baltimore, USA (TF-ThP9)
Conference Type International
Presentation Type Poster
Contribution Type Collaborative
Venue Baltimore, USA
Publisher and common publisher Junichi Iwata, Y. Hirano, H. Sase and H. Katsumata