Tsutsumi Toshiyuki    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2000/04
Presentation Theme	'Spectroscopic Ellipsometry for the Characterization of the Morphology of Ultra-thin Thermal CVD Amorphous and Nanocrystalline Silicon Thin Films'
Presentation Type	Speech (General)
Publisher and common publisher	◎S. HAZARA*(ETL・STA fellow) , M. YAMANAKA*(ETL・主任研究官) , I. SAKATA*(ETL・主任研究官) , T. TSUTSUMI(助手) , T. MAEDA*(ETL・主任研究官) , H. TAGUCHI*(Science Univ of Tokyo・大学院生) , E. SUZUKI*(ETL・主任研究官)