Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/09
Presentation Theme	Measurement of strain at HfsiO(N)/Si interface by UV Raman Spectroscopy
Presentation Type	Speech (General)
Publisher and common publisher	'International Workshop on sustenable enrgy and material 2006 (Tokyo) ◎T.Yoshida, D. Kosemura, K. Yamasaki, H. Kurozaki, A. Ogura'