Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2002/08
Presentation Theme	Organometallic Hf and Si precursors for Hf_1-x_Si_x_O_2_ thin film formation characterization
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　Atomic Layer Deposition (ALD2002) Conference M.ishikawa, T.Kada, M.Ishikawa, Y.Ohshita