Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2002/08
Presentation Theme	Organometallic Hf and Si precursors for Hf_1-x_Si_x_O_2_ thin film formation sythesis
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　Atomic Layer DEposition (ALD2002) Conference H.Machida, T.kada, H.Machida, Y.Oshida