Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2001/10
Presentation Theme	"HfO_2_ and Hf_1-x_Si_x_O_2_ deposition by MOCVD using TDEAH
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　Advanced Matallization Conference 2001 M.Isikawa, H.Machida, A.Ogura and Y.Oshita