Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/09
Presentation Theme	Evaluation of strain at Si_3_N_4_/Si interface by In-plane X-ray deffraction and UV-Raman spectroscopy
Presentation Type	Speech (General)
Publisher and common publisher	'International Workshop on sustenable enrgy and material 2006 (Tokyo) ◎Y. Kakemura, K. Yamasaki, D. Kosemura, T. Yoshida and A. Ogura'