Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2006/09
Presentation Theme Evaluation of strain at Si_3_N_4_/Si interface by In-plane X-ray deffraction and UV-Raman spectroscopy
Presentation Type Speech (General)
Publisher and common publisher 'International Workshop on sustenable enrgy and material 2006 (Tokyo) ◎Y. Kakemura, K. Yamasaki, D. Kosemura, T. Yoshida and A. Ogura'