Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2001/07
Presentation Theme MOCVD precursors for Ta and Hf compound films
Presentation Type Speech (General)
Publisher and common publisher 国際会議 Internationl Conference on Crystal Glowth
H.Machida, A.Hoshino, T.Suzuki, and Y.Oshita