Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
|
Date | 2001/07 |
Presentation Theme | MOCVD precursors for Ta and Hf compound films |
Presentation Type | Speech (General) |
Publisher and common publisher | 国際会議 Internationl Conference on Crystal Glowth H.Machida, A.Hoshino, T.Suzuki, and Y.Oshita |