Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2001/07
Presentation Theme	Formation of Epitaxially Ordered SiO_2_ in Oxygen-implanted Silicon During Thermal Annealin
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　International Conference on Crystal Growth T.Shimura, T.Hosoi, K.Fukuda, M.Umeno