Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
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Date | 2001/04 |
Presentation Theme | HfO_2_ Film Formation by Metalorganic Chemical Vapor Deposition |
Presentation Type | Speech (General) |
Publisher and common publisher | 国際会議 Spling Meeting of The Material research Society A.Hoshino,T.Suzuki,H.Machida, and Y.Ohshita |