Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2001/03
Presentation Theme	Gas Phase Chemical Reaction in Tantalum Nitride Low-pressure Chemical Vapor Deposition
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　Meeting of The Electrochemical Society Y.Ohshita,A.Hoshino,S.Hiro,A.Tawara, and H.Machida