Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2000/10
Presentation Theme	LPCVD of TaCN thin film for barrier layer in Cu interconnection
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　Advanced Metallization Conference A.Hoshino,S.Hiro, and H.Machida,Y.Ohshita,