Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
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Date | 2000/10 |
Presentation Theme | Photoluminescence Analysis of Anealing Process in Low-Dose SIMOX Wafers |
Presentation Type | Speech (General) |
Publisher and common publisher | 国際会議 IEEE International SOI Conference M.Tajima, s.Ibuka,J.Takiguchi,A. |