Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
|
Date | 1998/10 |
Presentation Theme | Defect Characterization in UNIBOND Wafers by Pholumine scemce Spectroscopy and Transmission Electron Microscopy |
Presentation Type | Speech (General) |
Publisher and common publisher | 国際会議 IEEE International SOI Conference M.Tajima |