Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
|
Date | 1998/09 |
Presentation Theme | Oxigen Precipitates amd Related Defects in SOI Substrate Fabricated by Wafer Bonding and H^+^ Splitting |
Presentation Type | Speech (General) |
Publisher and common publisher | 国際会議 International Conference on Solid State Devices and Materials M.TAjima |