Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	1986/08
Presentation Theme	Atomic Layer Epitaxy of Uniform GaAs on 3-inch Substrate in Low Pressure MOCVD System
Presentation Type	Speech (General)
Publisher and common publisher	国際会議 Conference on Solid State Devices and Materials K.Mori,M.Yoshida and H.Terao