Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/07
Presentation Theme	Chemical Vapor Deposition of NiSi using Ni(PF_3_)_4_ and Si_3_H_8_
Presentation Type	Speech (General)
Publisher and common publisher	'Asia-Pacific Coference on Semiconducting Silicides (Kyoto) ◎M. Ishikawa, I. Muramoto, H. Machida, S. Imai, Y. Ohshita and A. Ogura'