Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2006/05
Presentation Theme Discussion on Issues Toward 450mm Wafer
Presentation Type Speech (General)
Publisher and common publisher 'Inveited Silicon Materials Science and Technology Simposium Ⅹ, 209th Meeting of The Electrochemical (Denver, Colorado) ◎M. Watanabe, T. Fukuda, A. Ogura, Y. Kirino and M. Kohno '