Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/05
Presentation Theme	Discussion on Issues Toward 450mm Wafer
Presentation Type	Speech (General)
Publisher and common publisher	'Inveited Silicon Materials Science and Technology Simposium Ⅹ, 209th Meeting of The Electrochemical (Denver, Colorado) ◎M. Watanabe, T. Fukuda, A. Ogura, Y. Kirino and M. Kohno '