Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
|
Date | 2006/03 |
Presentation Theme | Measurement of in-plane and depth profiles of strain in strained-Si substrates |
Presentation Type | Speech (General) |
Publisher and common publisher | 'Second Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits (Grenoble, France) ◎D. Kosemura, K. Yamasaki, S. Tanaka and A. Ogura' |