Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2006/03
Presentation Theme Measurement of in-plane and depth profiles of strain in strained-Si substrates
Presentation Type Speech (General)
Publisher and common publisher 'Second Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits (Grenoble, France) ◎D. Kosemura, K. Yamasaki, S. Tanaka and A. Ogura'