Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2006/11
Presentation Theme X-ray photoelectron spectroscopy study on SiO_2_ formed on several orientated c-Si in high pressure water vapo
Presentation Type Speech (General)
Publisher and common publisher '2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY (Kawasaki) ◎N. Yamamoto, S. Tanakak, H. Sai, R. Imai, E. Ikenaga, I. Hirosawa, Y. Ohshita and A. Ogura'