Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/11
Presentation Theme	X-ray photoelectron spectroscopy study on SiO_2_ formed on several orientated c-Si in high pressure water vapo
Presentation Type	Speech (General)
Publisher and common publisher	'2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY (Kawasaki) ◎N. Yamamoto, S. Tanakak, H. Sai, R. Imai, E. Ikenaga, I. Hirosawa, Y. Ohshita and A. Ogura'