Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2005/11
Presentation Theme	Ni-silicide precursor for gate electrode
Presentation Type	Speech (General)
Publisher and common publisher	'27th International Symposium on Dry Process (Jeju, Korea) ◎M. Ishikawa, I. Muramoto, H. Machida, S. Imai, A. Ogura, H. Suzuki and Y.Ohshita'