Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
|
Date | 2006/11 |
Presentation Theme | SiO2/Si Interfacial Lattice Strain Revealed by Extremely Asymmetric X-ray Diffraction |
Presentation Type | Speech (General) |
Publisher and common publisher | '2006 International Workshop on DIELECTRIC THIN FILMS FOR FUTURE ULSI DEVICES: SCIENCE AND TECHNOLOGY (Kawasaki) ◎H. Yoshida, K. Akimoto, Y. Ito, T. Emoto, N. Yamamoto, Y. Ohshita, A. Ogura' |