Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
|
Date | 2005/10 |
Presentation Theme | Chemical Vapor Deposition of Ni-silicide for gate electrode |
Presentation Type | Speech (General) |
Publisher and common publisher | 'Advanced Metallization Conference 2005 (Tokyo) ◎M. Ishikawa, I. Muramoto, H. Machida, Y. Ohshita, S. Imai and A. Ogura' |