Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2005/10
Presentation Theme	Relaxation of Strained-SOI substrates by RTA process
Presentation Type	Speech (General)
Publisher and common publisher	'IEEE International SOI Conference (Hawaii, USA) ◎K. Yamasaki, D. Kosemura, S.Tanaka , A. Ogura, I. Chiba and R. Shimidzu '