Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2005/09
Presentation Theme Composition control of Ni-silicide by CVD using Ni(PF_3_)_4_ and Si_3_H_8_
Presentation Type Speech (General)
Publisher and common publisher 'International Conference on Solid State Devices and Materials (Kobe, Japan) ◎M. Ishikawa, I. Muramoto, H. Machida, Y. Ohshita, S. Imai and A. Ogura'