Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/10
Presentation Theme	W-CVD using biscyclopentadienyltungsten system
Presentation Type	Speech (General)
Publisher and common publisher	'Advanced Metallization Conference, US Session (San Diego) ◎S. Imai, T. Kagawa H. Kurozaki, A. Ogura, M. Ishikawa, I. Muramoto, H, Machida '