Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
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Date | 2005/07 |
Presentation Theme | Crystallinity Estimation of Strained-Si Wafers by Using Highly Parallel X-Ray Microbeam |
Presentation Type | Speech (General) |
Publisher and common publisher | 'The 8th International Conference on X-ray Microscopy (Himeji, Japan) ◎Y. Tsusaka, K. Fukuda, N. Tomita, K. Hayashi, Y. Kagoshima, J. Matsui and A. Ogura' |