Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2005/07
Presentation Theme Crystallinity Estimation of Strained-Si Wafers by Using Highly Parallel X-Ray Microbeam
Presentation Type Speech (General)
Publisher and common publisher 'The 8th International Conference on X-ray Microscopy (Himeji, Japan) ◎Y. Tsusaka, K. Fukuda, N. Tomita, K. Hayashi, Y. Kagoshima, J. Matsui and A. Ogura'