Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2005/05
Presentation Theme	Nickel thin film deposition using Ni(PF_3_)_4_ for LSI electrode
Presentation Type	Speech (General)
Publisher and common publisher	'International Symposium on Silicon-on-insulator Technology and Electrochemical Society Meeting (Quebec City. Canada) ◎M.Ishikawa, H. Machida, A. Ogura and Y. Ohshita'