Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
|
Date | 2005/05 |
Presentation Theme | Evaluation of commercial SGOI and SSOI wafers comparing with epitaxially grown strained-Si by means of laser confocal inspection system |
Presentation Type | Speech (General) |
Publisher and common publisher | 'International Symposium on Silicon-on-insulator Technology and Electrochemical Society Meeting (Quebec City. Canada) ◎A. Ogura, O. Okabayashi ' |