Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2005/05
Presentation Theme Evaluation of commercial SGOI and SSOI wafers comparing with epitaxially grown strained-Si by means of laser confocal inspection system
Presentation Type Speech (General)
Publisher and common publisher 'International Symposium on Silicon-on-insulator Technology and Electrochemical Society Meeting (Quebec City. Canada) ◎A. Ogura, O. Okabayashi '