Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
Date 2006/10
Presentation Theme Evaluation of SOI substrates with local or global strain by means of in-plane XRD measurement
Presentation Type Speech (General)
Publisher and common publisher 'IEEE International SOI Conference (Niagara Falls) ◎D. Kosemura, K. Yamasaki, S. Tanaka, Y. Kakemura, T. Yoshida and A. Ogura'