Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
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Date | 2006/10 |
Presentation Theme | Evaluation of SOI substrates with local or global strain by means of in-plane XRD measurement |
Presentation Type | Speech (General) |
Publisher and common publisher | 'IEEE International SOI Conference (Niagara Falls) ◎D. Kosemura, K. Yamasaki, S. Tanaka, Y. Kakemura, T. Yoshida and A. Ogura' |