Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
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Date | 2004/06 |
Presentation Theme | Surface reaction in Ni MOCVD using cyclopentadienylallylnikel as a precursors Properties of CVD precursors for Ni |
Presentation Type | Speech (General) |
Publisher and common publisher | 国際会議 Fourteenth International Conference on Crystal on Crystal Growth M.Ishikawa, T.Kada, H.Machida, Y.Ohshita |