Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
発表年月日 2004/06
発表テーマ Surface reaction in Ni MOCVD using cyclopentadienylallylnikel as a precursors Properties of CVD precursors for Ni
発表形式 口頭(一般)
発表者・共同発表者 国際会議  Fourteenth International Conference on Crystal on Crystal Growth
M.Ishikawa, T.Kada, H.Machida, Y.Ohshita