Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/09
Presentation Theme	Properties of chemical reaction during Ni and Ni-silicide deposition using Ni(PF_3_)_4_ and Si_3_H_8
Presentation Type	Speech (General)
Publisher and common publisher	Advanced metallization Conference, Asian Session I. Muramoto, H. Machida, S. Imai, A. Ogura, Y.Ohshita