Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2003
Presentation Theme	Vacancy-type defects in SOI wafwrs probed by monoenergetic positron beam
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　The Forum on the Science Technology of Silicon Materials2003 A.UEdono, N.Hattori, J.Kudo, T.Nishikawa