Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2003/10
Presentation Theme	Precursors for NiSi MOCVD
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　Advanced Matallization Conference2003 T.Kada, M.Ishikawa, H,Machida, Y.Ohshita