Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2003/09
Presentation Theme	NiSi MOCVD for FinFET and UTB-SOI
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　IEEE International SOI Conference H.Wakabayashi, M.Ishikawa, T.Kada, H.Machida, Y.Ohshita