Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2003/04
Presentation Theme	Evaluation of commercial Ultra-thin SOI Substrates using Confocal Laser Inspection System
Presentation Type	Speech (General)
Publisher and common publisher	国際会議　　International Sympoisum on silicon-on-insulator Technology and Devices O.Okabayashi