Ogura Atusi    Department   Undergraduate School  , School of Science and Technology    Position   Professor
Date	2006/09
Presentation Theme	Properties of Ni and Ni-silicide deposition using Ni(PF_3_)_4_ and Si_3_H_8_
Presentation Type	Speech (General)
Publisher and common publisher	'International Workshop on sustenable enrgy and material 2006 (Tokyo) ◎M. Ishikawa, I. Muramoto, H. Machida, S. Imai, A. Ogura, Y.Ohshita'