Ogura Atusi
   Department   Undergraduate School  , School of Science and Technology
   Position   Professor
発表年月日 2002/12
発表テーマ SOI Formation by Light ION Implantation and Annealing in Oxigen Including Atmoshere
発表形式 口頭(一般)
発表者・共同発表者 国際会議  International Workshop on Junction Technology