Ogura Atusi
Department Undergraduate School , School of Science and Technology Position Professor |
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発表年月日 | 2002/12 |
発表テーマ | SOI Formation by Light ION Implantation and Annealing in Oxigen Including Atmoshere |
発表形式 | 口頭(一般) |
発表者・共同発表者 | 国際会議 International Workshop on Junction Technology |