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YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology Position Assistant Professor |
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| Date | 2021/10/10 |
| Presentation Theme | Evaluation of Chemical and Physical Conformality for SiNx Films Deposited on Trench Substrate By Atomic Layer Deposition |
| Conference | 240th ECS Meeting |
| Conference Type | International |
| Presentation Type | Speech (Invitation/Special) |
| Contribution Type | Collaborative |
| Invited | Invited |
| Publisher and common publisher | Atsushi Ogura, Ryo Yokogawa, Tappei Nishihara, Yuji Otsuki, Munehito Kagaya |