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YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology Position Assistant Professor |
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| Date | 2019/10/30 |
| Presentation Theme | Stress Evaluation Induced by Wiggling SiN Fine Pattern by Using Raman Spectroscopy |
| Conference | 32nd International Microprocess and Nanotechnology Conference (MNC 2019) |
| Conference Type | International |
| Presentation Type | Poster |
| Contribution Type | Collaborative |
| Publisher and common publisher | Masato Koharada, Ryo Yokogawa, Naomi Sawamoto, Kazutoshi Yoshioka, Atsushi Ogura |