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YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology Position Assistant Professor |
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| Date | 2020/09/29 |
| Presentation Theme | Chemical Structure of SiN Films Deposited on High Aspect Trench by Plasma Enhanced Atomic Layer Deposition |
| Conference | 2020 International Conference on Solid State Devices and Materials |
| Conference Type | International |
| Presentation Type | Speech (General) |
| Contribution Type | Collaborative |
| Publisher and common publisher | Tappei Nishihara, Ryo Yokogawa, Yuji Otsuki, Munehito Kagaya, Atsushi Ogura |