YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology Position Assistant Professor |
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Date | 2020/10/06 |
Presentation Theme | Evaluation of Silicon Nitride Film Formed by Atomic Layer Deposition on the Silicon Substrate with Trench Structure Using Angle-Resolved Hard X-ray Photoelectron Spectroscopy |
Conference | Pacific Rim Meeting on Electrochemical and Solid State Science 2020 (PRiME 2020) |
Conference Type | International |
Presentation Type | Speech (General) |
Contribution Type | Collaborative |
Publisher and common publisher | Tappei Nishihara, Ryo Yokogawa, Yuji Otsuki, Munehito Kagaya, Atsushi Ogura |