Faculty Database - YOKOGAWA RYO

Books and Papers

Conference Presentations

Academic Qualifications

Career History

researchmap Researcher Code

Current Specialized Field

KAKENHI Researcher Number

（Last updated : 2022-08-30 21:06:18）

YOKOGAWA RYO
Department Undergraduate School , School of Science and Technology

Position Assistant Professor

■ Books and Papers

1.	2022/08	Article	Study on phonon lifetime in bulk silicon–germanium through observation of acoustic phonon spectra broadening by inelastic x-ray scattering Applied Physics Letters 121(8),pp.082105-082105 (Collaboration)
2.	2022/02	Article	Modification and Characterization of Interfacial Bonding for Thermal Management of Ruthenium Interconnects in Next-Generation Very-Large-Scale Integration Circuits ACS Applied Materials and Interfaces 14(5),pp.7392-7404 (Collaboration)
3.	2021/11	Article	Atomic mass dependency of a localized phonon mode in SiGe alloys AIP Advances 11,pp.115225-1-115225-10 (Collaboration)
4.	2021/07	Article	Dependency of a localized phonon mode intensity on compositional cluster size in SiGe alloys AIP Advances 11(7),pp.075017-075017 (Collaboration)
5.	2021/05	Article	Thermal conductivity and inelastic X-ray scattering measurements on SiGeSn polycrystalline alloy Japanese Journal of Applied Physics 60(SB) (Collaboration)
6.	2020/12	Article	Strain evaluation in Ge and Sn implanted Si layers with laser and rapid thermal annealing Materials Science in Semiconductor Processing 120,pp.105282-105282 (Collaboration)
7.	2020/11	Article	Origin of carrier lifetime degradation in floating-zone silicon during a high-temperature process for insulated gate bipolar transistor Japanese Journal of Applied Physics 59,pp.115503-1-115503-6 (Collaboration)
8.	2020/09	Article	Evaluation of Thermal Conductivity Characteristics in Polycrystalline Silicon - The Effect of Nanostructure in the Grains ECS Transactions 98(5),pp.437-446 (Collaboration)
9.	2020/09	Article	Evaluation of Silicon Nitride Film Formed by Atomic Layer Deposition on the Silicon Substrate with Trench Structure Using Angle-Resolved Hard X-ray Photoelectron Spectroscopy ECS Transactions 98(3),pp.113-120 (Collaboration)
10.	2020/09	Article	Evaluation of Thermal Expansion Coefficient in Ge_1-xSn_x Nanowire Using Reciprocal Space Mapping ECS Transactions 98(5),pp.481-490 (Collaboration)
11.	2020/09	Article	Evaluation of Temperature and Germanium Concentration Dependence of EXAFS Oscillations in Si-Rich Silicon Germanium Thin Films ECS Transactions 98(5),pp.473-479 (Collaboration)
12.	2020/09	Article	Observation of an Unidentified Phonon Peak in SiGe Alloys and Superlattices Using Molecular Dynamics Simulation ECS Transactions 98(5),pp.533-546 (Collaboration)
13.	2020/09	Article	Evaluation of Strain-Shift Coefficients for SiSn by Raman Spectroscopy ECS Transactions 98(5),pp.291-300 (Collaboration)
14.	2020/09	Article	Evaluation of Phonon Dispersion Relation for Bulk Silicon Germanium by Inelastic X-ray Scattering ECS Transactions 98(5),pp.465-472 (Collaboration)
15.	2020/07	Article	Quantification of Ge fraction using local vibrational modes in Raman spectra of silicon germanium by oil-immersion Raman spectroscopy Japanese Journal of Applied Physics 59(7),pp.075502-075502 (Collaboration)
16.	2020/06	Article	Anomalous low energy phonon dispersion in bulk silicon-germanium observed by inelastic x-ray scattering Applied Physics Letters 116(24),pp.242104-242104 (Collaboration)
17.	2020/06	Article	Phonon dispersion of bulk Ge-rich SiGe: inelastic X-ray scattering studies Japanese Journal of Applied Physics 59(6),pp.061003-1-061003-6 (Collaboration)
18.	2020/06	Article	Stress evaluation induced by wiggling silicon nitride fine pattern using Raman spectroscopy Japanese Journal of Applied Physics 59(SI),pp.SIIF03-1-SIIF03-6 (Collaboration)
19.	2020/03	Article	Anisotropic biaxial stress evaluation in metal-organic chemical vapor deposition grown Ge1-xSnx mesa structure by oil-immersion Raman spectroscopy Thin Solid Films 697,pp.137797-1-137797-5 (Collaboration)
20.	2019/06	Article	Evaluation of thermal conductivity characteristics in Si nanowire covered with oxide by UV Raman spectroscopy Japanese Journal of Applied Physics 58(SD),pp.SDDF04-1-SDDF04-5 (Collaboration)
21.	2019/06	Article	Ultra-Thin Lightweight Bendable Crystalline Si Solar Cells for Solar Vehicles Conference Record of the IEEE Photovoltaic Specialists Conference pp.1131-1134 (Collaboration)
22.	2019/04	Article	Evaluations of minority carrier lifetime in floating zone Si affected by Si insulated gate bipolar transistor processes Japanese Journal of Applied Physics 58(SB),pp.SBBD07-SBBD07 (Collaboration)
23.	2018/10	Article	Determination of phonon deformation potentials and strain-shift coefficients in Ge-rich Si1-xGex using bulk Ge-rich Si1-xGex crystals and oil-immersion Raman spectroscopy Japanese Journal of Applied Physics 57(10),pp.106601-106601 (Collaboration)
24.	2018/09	Article	Determination of Phonon Deformation Potentials in Carbon-doped Silicon ECS Transactions 86(7),pp.419-425 (Collaboration)
25.	2018/09	Article	Evaluation of Anisotropic Three-Dimensional Strain Relaxation in Stripe-Shaped Ge1-xSnx Mesa Structure ECS Transactions 86(7),pp.329-336 (Collaboration)
26.	2018/09	Article	Evaluation of Laterally Graded Silicon Germanium Wires for Thermoelectric Devices Fabricated by Rapid Melting Growth 86(7),pp.87-93 (Collaboration)
27.	2018/05	Article	Miniaturized planar Si-nanowire microthermoelectric generator using exuded thermal field for power generation Science and Technology of Advanced Materials 19(1),pp.443-453 (Collaboration)
28.	2018/05	Article	Evaluation of Anisotropic Biaxial Stress Induced Around Trench Gate of Si Power Transistor Using Water-Immersion Raman Spectroscopy Journal of Electronic Materials 47,pp.5050-5055 (Collaboration)
29.	2017/11	Article	Probing spatial heterogeneity in silicon thin films by Raman spectroscopy Scientific Reports 7,pp.16549-1-16549-8 (Collaboration)
30.	2017/11	Article	Local anisotropic strain evaluation in thin Ge epitaxial film using SiGe stressor template grown on Ge substrate by selective ion implantation 56(11),pp.110313-110313 (Collaboration)
31.	2017/10	Article	Enhanced nickelidation rate in silicon nanowires with interfacial lattice disorder Journal of Applied Physics 122(14),pp.144305-144305 (Collaboration)
32.	2017/06	Article	Evaluation of controlled strain in silicon nanowire by UV Raman spectroscopy Japanese Journal of Applied Physics 56(6S1),pp.06GG10-06GG10 (Collaboration)
33.	2016/09	Article	Biaxial stress evaluation in GeSn film epitaxially grown on Ge substrate by oil-immersion Raman spectroscopy Japanese Journal of Applied Physics 55(9),pp.091301-091301 (Collaboration)
34.	2016/07	Article	Origin of additional broad peaks in Raman spectra from thin germanium-rich silicon-germanium films Applied Physics Express 9(7),pp.071301-071301 (Collaboration)
35.	2016/05	Article	Crystallinity Evaluation of Low Temperature Polycrystalline Silicon Thin Film Using UV/Visible Raman Spectroscopy ECS Transactions 72(4),pp.249-255 (Collaboration)
36.	2015/05	Article	Evaluation of Anisotropic Biaxial Stress in Si1-XGeX/Ge Mesa-Structure by Oil-Immersion Raman Spectroscopy ECS Transactions 66(4),pp.39-45 (Collaboration)
37.	2015/05	Article	On the Origin of the Gate Oxide Failure Evaluated by Raman Spectroscopy ECS Transactions 66(4),pp.237-243 (Collaboration)
38.	2014/10	Article	Evaluation of Anisotropic Biaxial Stress in Thin Strained-SiGe Layer Using Surface Enhanced Raman Spectroscopy ECS Transactions 64(6),pp.841-847 (Collaboration)
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■ Conference Presentations

1.	2021/10/10	Evaluation of Chemical and Physical Conformality for SiNx Films Deposited on Trench Substrate By Atomic Layer Deposition (240th ECS Meeting)
2.	2021/10/10	Anisotropic in-Plane and out-of-Plane Strain Relaxation in Carbon-Doped Silicon Nanowires Evaluated by X-Ray Reciprocal Space Mapping (240th ECS Meeting)
3.	2021/10/10	Optical Properties of Bulk Silicon Germanium in the Near Infrared Evaluated By Spectroscopic Ellipsometry (240th ECS Meeting)
4.	2021/10/10	Evaluation of Mo_(1-x)W_xs Alloy Fabricated By Combinatorial Film Deposition (240th ECS Meeting)
5.	2021/10/10	Effect of Growth Parameters on MoS₂ Film Quality Deposited by Low-Temperature MOCVD Using I-Pr₂DADmo(CO)₃ and (t-C₄H₉)2S₂ (240th ECS Meeting)
6.	2021/09/13	Effect of cluster size distribution in SiGe alloys on local phonon mode intensity (第82回応用物理学会秋季学術講演会)
7.	2021/09/12	Hole mobility enhancement in extremely-thin body asymmetrically-strained (100) GOI pMOSFETs (第82回応用物理学会秋季学術講演会)
8.	2020/10/09	Evaluation of Thermal Expansion Coefficient in Ge1-xSnx Nanowire Using Reciprocal Space Mapping (Pacific Rim Meeting on Electrochemical and Solid State Science 2020 (PRiME 2020))
9.	2020/10/09	Evaluation of Phonon Dispersion Relation for Bulk Silicon Germanium by Inelastic X-ray Scattering (Pacific Rim Meeting on Electrochemical and Solid State Science 2020 (PRiME 2020))
10.	2020/10/09	Evaluation of Strain-Shift Coefficients for SiSn by Raman Spectroscopy (Pacific Rim Meeting on Electrochemical and Solid State Science 2020 (PRiME 2020))
11.	2020/10/06	Observation of an Unidentified Phonon Peak in SiGe Alloys and Superlattices Using Molecular Dynamics Simulation (Pacific Rim Meeting on Electrochemical and Solid State Science 2020 (PRiME 2020))
12.	2020/10/06	Evaluation of Silicon Nitride Film Formed by Atomic Layer Deposition on the Silicon Substrate with Trench Structure Using Angle-Resolved Hard X-ray Photoelectron Spectroscopy (Pacific Rim Meeting on Electrochemical and Solid State Science 2020 (PRiME 2020))
13.	2020/09/29	Chemical Structure of SiN Films Deposited on High Aspect Trench by Plasma Enhanced Atomic Layer Deposition (2020 International Conference on Solid State Devices and Materials)
14.	2020/09/29	Effect of Ion Irradiation on Thermal Conductivity along SiO2/Si Interface Evaluated by Molecular Dynamics (2020 International Conference on Solid State Devices and Materials)
15.	2020/09/28	Inelastic X-ray Scattering Measurement on SiGeSn Polycrystalline Alloy (2020 International Conference on Solid State Devices and Materials)
16.	2019/12/13	Evaluation of Temperature and Ge Concentration Dependence of EXAFS Oscillations in SiGe Thin Films (Materials Research Meeting 2019 (MRM2019))
17.	2020/01/31	Origin of Anomalous Phonon State in SiGe Alloys Studied with Molecular Dynamics (電子デバイス界面テクノロジー研究会 ―材料・プロセス・デバイス特性の物理―(第25回研究会))
18.	2019/12/13	Investigation of Phonon Dispersion Curve for Silicon Germanium Alloy by Using Inelastic X-ray Scattering (Materials Research Meeting 2019 (MRM2019))
19.	2019/11/27	Strain Evaluation of Laser-annealed or RTA Sn-doped SiGe Layers (8th International Symposium on Control of Semiconductor Interfaces)
20.	2019/11/05	Characterization of Bendable Crystalline Si Solar Cells Made by Ultra-thin Wafer Slicing (29th International Photovoltaic Science and Engineering Conference (PVSEC-29))
21.	2019/10/30	Stress Evaluation Induced by Wiggling SiN Fine Pattern by Using Raman Spectroscopy (32nd International Microprocess and Nanotechnology Conference (MNC 2019))
22.	2019/10/16	Determination of Phonon Deformation Potentials in Carbon-doped Silicon (236th Electrical Chemical Society (ECS) Meeting)
23.	2019/10/16	Evaluation of Thermal Conductivity Characteristics in Polycrystalline Silicon Grains with Nanostructures by Raman Spectroscopy (236th Electrical Chemical Society (ECS) Meeting)
24.	2019/10/16	Temperature Measurement for Si Nanowire Thermoelectric Generators by Operand Raman Spectroscopy (236th Electrical Chemical Society (ECS) Meeting)
25.	2019/09/10	Evaluation of Strain Relaxation in Stripe-Shaped Ge_1-xSn_x Mesa Structure Using X-ray Diffraction Reciprocal Space Mapping (18th Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVIII))
26.	2019/09/10	Evaluation of Anisotropic Stress for Laterally Graded Silicon Germanium Wires by Raman Spectroscopy (18th Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVIII))
27.	2019/09/09	Sawing Damage Control for Thin Flexible Si Solar Cells (36th European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC 2019))
28.	2019/06/18	Ultra-Thin Lightweight Bendable Crystalline Si Solar Cells for Solar Vehicles (46th IEEE Photovoltaic Specialists Conference (PVSC 46))
29.	2018/11/19	Minority carrier lifetime degradation in FZ-Si by advanced Si-IGBT processes (The Forum on the Science and Technology of Silicon Materials 2018)
30.	2018/11/16	Evaluation of thermal conductivity characteristics in Si nanowire covered with oxide by UV Raman spectroscopy (31st International Microprocesses and Nanotechnology Conference (MNC 2018))
31.	2018/10	Determination of Phonon Deformation Potentials in Carbon-doped Silicon (2018 Americas International Meeting on Electrochemistry and Solid State Science)
32.	2018/10	Evaluation of Anisotropic Three-Dimensional Strain Relaxation in Stripe-Shaped Ge1-xSnx Mesa Structure (2018 Americas International Meeting on Electrochemistry and Solid State Science)
33.	2018/10	Evaluation of Laterally Graded Silicon Germanium Wires for Thermoelectric Devices Fabricated by Rapid Melting Growth (2018 Americas International Meeting on Electrochemistry and Solid State Science)
34.	2018/09/30	Strain Evaluation of Laser-annealed SiGe Thin Layers (2018 Americas International Meeting on Electrochemistry and Solid State Science)
35.	2018/09/13	Evaluations of Minority Carrier Lifetime in FZ-Si Affected by Si-IGBT Processes (2018 International Conference on Solid State Devices and Materials (SSDM 2018))
36.	2018/01	Evaluation of Strain in the Oxide Covered Silicon Nanowires for Thermoelectric Devices by Raman Spectroscopy (45th Conference on the Physics & Chemistry of Surfaces & Interfaces)
37.	2017/10/10	Anisotropic Biaxial Strain Evaluation in MOCVD Grown Ge1-xSnx Mesa Patterned Structure by Oil-Immersion Raman Spectroscopy (17th Conference on Defect Recognition and Image, Processing in Semiconductors (DRIP XVII))
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■ Academic Qualifications

1.	2017/04～2020/03	〔Doctorial Course (2nd Semester)〕, Graduate School, Division of Science and Engineering, Meiji University, Completed,
2.	2015/04～2017/03	〔Master Course〕, Graduate School, Division of Science and Engineering, Meiji University, Completed,
3.	2011/04～2015/03	Faculty of Science and Engineering, Meiji University, Graduated,

■ Career History

2017/04～2020/03

Special researcher of the Japan Society for the Promotion of Science

■ researchmap Researcher Code

R000002872

■ Current Specialized Field

Electric and electronic materials

■ KAKENHI Researcher Number

10880619